Ion microprobe system combined with scanning electron microscope for high precision aiming

Iwao Ohdomari, M. Sugimori, M. Koh, Katsunori Noritake, Yu Takiguchi, Hiroshi Shimizu, Ryuichi Tanaka, Tomihiro Kamiya, N. Utsunomiya, Eisuke Minehara

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1992 · 15 citations · 5 references

Concepts

References

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