Concepedia

Publication | Closed Access

Ion microprobe system combined with scanning electron microscope for high precision aiming

DOI

15

Citations

5

References

1992

Year

Iwao Ohdomari, M. Sugimori, M. Koh, Katsunori Noritake, Yu Takiguchi, Hiroshi Shimizu, Ryuichi Tanaka, Tomihiro Kamiya, N. Utsunomiya, Eisuke Minehara
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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