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Ion microprobe system at Waseda University for semiconductor analysis

Iwao Ohdomari, M. Sugimori, M. Koh, Katsunori Noritake, Mutsuo Ishikawa, Hiroshi Shimizu, Ryuichi Tanaka, Tomihiro Kamiya, N. Utsunomiya

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1991 · 21 citations · 1 references

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References

1

Ion microbeam applications in semiconductors

J. S. Williams, Jeffrey C. McCallum, Richard A. Brown · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1988 · 25 citations

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