Concepedia

Ion microbeam applications in semiconductors

J. S. Williams, Jeffrey C. McCallum, Richard A. Brown

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1988 · 25 citations · 3 references

DOI

Concepts

References

3

On the determination of optimum depth-resolution conditions for rutherford backscattering analysis

J. S. Williams, W. Möller · Nuclear Instruments and Methods · 1978 · 92 citations

, , +6

Total quantitative recording of elemental maps and spectra with a scanning microprobe

G.J.F. Legge · Journal of Microscopy · 1979 · 78 citations

, , +16

Channeling contrast microscopy: Application to semiconductor structures

Jeffrey C. McCallum, Chris McKenzie, Mathew A. Lucas et al. · Applied Physics Letters · 1983 · 32 citations

, , +15