A new silicon rate gyroscope

Electrostatic Comb Drive Levitation And Control Method

William C. Tang, Martin Lim, Roger T. Howe · Journal of Microelectromechanical Systems · 1992 · 289 citations

Engineering, Electrical Engineering, Mechanical Engineering +16

A micromachined comb-drive tuning fork rate gyroscope

Jonathan Bernstein, S. Cho, A. Thomas King et al. · 2002 · 283 citations

Engineering, Electrical Engineering, Mechanical Engineering +11

A micromachined vibrating gyroscope

Katsuhiro Tanaka, Yoichi Mochida, Masakazu Sugimoto et al. · Sensors and Actuators A Physical · 1995 · 136 citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +15

Novel Process For A Monolithic Integrated Accelerometer

M. Offenberg, Franz Lärmer, B. Elsner et al. · Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 121 citations

Engineering, Manufacturing Engineering, Microfabrication +16

A precision yaw rate sensor in silicon micromachining

M. Lutz, W. Golderer, J. Gerstenmeier et al. · 2002 · 66 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +17