Microactuators and their technologies

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

Engineering, Materials Engineering, Materials Science +13

Microfluidics-a review

Peter Gravesen, J. Branebjerg, O S Jensen · Journal of Micromechanics and Microengineering · 1993 · 1K citations

Engineering, Bioengineering, Fluid Dynamics +16

A piezoelectric micropump based on micromachining of silicon

H.T.G. van Lintel, F.C.M. van de Pol, S. Bouwstra · Sensors and Actuators · 1988 · 617 citations · Full text

Engineering, Materials Engineering, Mechanical Engineering +12

Stiction in surface micromachining

Niels R. Tas, T. Sonnenberg, Henri Jansen et al. · Journal of Micromechanics and Microengineering · 1996 · 544 citations · Full text

Engineering, Materials Science, Mechanical Engineering +16

IC-processed electrostatic micromotors

Long-Shen Fan, Yu‐Chong Tai, R.S. Muller · Sensors and Actuators · 1989 · 488 citations