Journal of Micromechanics and Microengineering · 1993 · 1K citations · 83 references
EngineeringBioengineeringFluid DynamicsMicroelectromechanical SystemsMicrofabricationFlow SensorsMicrofabrication ProcessesMicrofluidic DevicesMicrofluidic SystemsMicrofluidic TransportMicrofluidicsMicrochannel HydrodynamicsMicrofluidic FlowMicrofluidic Flow SensorsMicrofluidic ModelingMicrofluidic PumpsMicrofluidic SensorsMicrofluidic ValvesValved Microfluidic Systems
An overview is given of research activities in the field of fluid components or systems built with microfabrication technologies. This review focuses on the fluidic behaviour of the various devices, such as valves, pumps and flow sensors as well as the possibilities and pitfalls related to the modelling of these devices using simple flow theory. Finally, a number of microfluidic systems are described and comments on future trends are given.
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