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A study of GaN regrowth on the micro-faceted GaN template formed by in situ HCl etching

Materials ScienceMaterials EngineeringWide-bandgap SemiconductorEngineeringMicrofabricationSurface ScienceApplied PhysicsSitu Hcl EtchingMicro-faceted Gan TemplateAluminum Gallium NitrideGan RegrowthGan Power DeviceCategoryiii-v SemiconductorPlasma Etching