Concepedia

Characterization of the silicon nitride–thermal oxide interface in oxide–nitride–oxide structures by ELS, XPS, ellipsometry, and numerical simulation

V. A. Gritsenko, S. N. Svitasheva, I. P. Petrenko, Yu. N. Novikov, Yu. N. Morokov, Hei Wong, R. W. M. Kwok, R. W. M. Chan

Microelectronics Reliability · 1998 · 10 citations · 10 references

DOI

Concepts

References

10

Microscopic Structure Of The SiO2/Si Interface

F. J. Himpsel, F. R. McFeely, A. Taleb‐Ibrahimi et al. · 1988 · 211 citations

, , +14

On the nature of deep centres responsible for the memory effect and luminescence of a-SiNx with x ≦ 4/3

P. A. Pundur, J. G. Shavalgin, V. A. Gritsenko · physica status solidi (a) · 1986 · 50 citations

, , +6

Compositional Depth Profile of a Native Oxide LPCVD MNOS Structure Using X‐Ray Photoelectron Spectroscopy and Chemical Etching

J. A. Wurzbach, F. J. Grunthaner · Journal of The Electrochemical Society · 1983 · 35 citations

, , +17

Electronic structure of amorphous Si3N4: experiment and numerical simulation

V. A. Gritsenko, Yu. N. Morokov, Yu. N. Novikov · Applied Surface Science · 1997 · 31 citations

, , +16

Electron spin resonance study of radiation-induced points defects in nitrided and reoxidized nitrided oxides

J. T. Yount, Patrick M. Lenahan, G.J. Dunn · IEEE Transactions on Nuclear Science · 1992 · 30 citations

, , +16