Journal of Crystal Growth · 2011 · 39 citations · 14 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsEtching ProcessesSemiconductor Device MaterialsSemiconductor HeterostructuresThin-film DepositionWide Band Gap SemiconductorsWide-bandgap Semiconductor DevicesEtch ChemistryEtch MechanismsEtchingGallium Nitride (Gan) MaterialsWet Etching
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