Gallium arsenide etching using ion beams from hydrogen/methane mixtures

Statistics for Experimenters

Sidney Addelman, G. E. P. Box, W. G. Hunter et al. · Technometrics · 1979 · 6.5K citations

Handbook of ion beam processing technology

J. J. Cuomo, S. M. Rossnagel, Commonwealth Scientific Corp. · OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information) · 1989 · 343 citations

Natural Sciences, Materials Engineering, Materials Science +15

Reactive ion etching of InP using CH4/H2 mixtures: Mechanisms of etching and anisotropy

Todd R. Hayes, M. Dreisbach, W. C. Dautremont–Smith et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 142 citations

Natural Sciences, Materials Engineering, Materials Science +17

Reactive ion etching of GaAs using a mixture of methane and hydrogen

Rebecca Cheung, S. Thoms, S.P. Beamont et al. · Electronics Letters · 1987 · 110 citations

Engineering, Electrical Engineering, Materials Science +17

Identification of volatile products in low pressure hydrocarbon electron cyclotron resonance reactive ion etching of InP and GaAs

D. L. Melville, J.G. Simmons, D. A. Thompson · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 50 citations

Natural Sciences, Materials Science, Physics +14