Statistics
Publications
1
Citations
142
H-Index
1
Active since
1989
Affiliations
AT&T (United States)(Current)
M. Dreisbach is an author at AT&T (United States) specializing in thin film etching, surface science, and device fabrication.
Publications per year
1989–1989
1
1
Reactive ion etching of InP using CH4/H2 mixtures: Mechanisms of etching and anisotropy
Todd R. Hayes, M. Dreisbach, W. C. Dautremont–Smith et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 142 citations
Natural Sciences, Materials Engineering, Materials Science +17
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