Statistics
Publications
19
Citations
1.7K
H-Index
16
Active since
1987
Affiliations
AT&T (United States)(Current)
Todd R. Hayes is an author at AT&T (United States) specializing in materials science, natural sciences, and materials engineering.
Publications per year
1987–1993
19
19
Cross-section measurements for electron-impact ionization of atoms
Robert S. Freund, Robert C. Wetzel, R. J. Shul et al. · Physical Review A · 1990 · 372 citations
Reactive ion etching of InP using CH4/H2 mixtures: Mechanisms of etching and anisotropy
Todd R. Hayes, M. Dreisbach, W. C. Dautremont–Smith et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 142 citations
Natural Sciences, Materials Engineering, Materials Science +17
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