Thin Solid Films · 2009 · 13 citations · 12 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySurface ChemistryThin FilmsAtomic Layer DepositionCoatingsSurface PhysicsThin Film Surface MorphologyThin-film DepositionThin-film MaterialsAtomic Layer Deposition InterfacesAtomic Layer Deposition PassivationAtomic Layer Deposition PrecursorsThin Film Deposition MaterialsThin Oxide Layers
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1.5 nm direct-tunneling gate oxide Si MOSFET's
H. Sasaki, Mizuki Ono, T. Yoshitomi et al. · IEEE Transactions on Electron Devices · 1996 · 346 citations