Smart-Cut® technology: from 300 mm ultrathin SOI production to advanced engineered substrates

Band structure, deformation potentials, and carrier mobility in strained Si, Ge, and SiGe alloys

Massimo V. Fischetti, S.E. Laux · Journal of Applied Physics · 1996 · 1.5K citations

Engineering, Sige Alloys, Silicon On Insulator +16

Silicon on insulator material technology

M. Bruel · Electronics Letters · 1995 · 995 citations

Materials Engineering, Materials Science, Electrical Engineering +15

Electron mobility enhancement in strained-Si n-type metal-oxide-semiconductor field-effect transistors

J.J. Welser · IEEE Electron Device Letters · 1994 · 362 citations

Semiconductors, Semiconductor Technology, Electrical Engineering +12

Application of hydrogen ion beams to Silicon On Insulator material technology

M. Bruel · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1996 · 311 citations

Materials Engineering, Ion Implantation, Engineering +7

Layer splitting process in hydrogen-implanted Si, Ge, SiC, and diamond substrates

Qiaoling Tong, Karsten Gutjahr, S. Hopfe et al. · Applied Physics Letters · 1997 · 220 citations

Diamond Samples, Engineering, Same Activation Energy +18