Karsten Gutjahr

Statistics

Publications

Citations

273

H-Index

Active since

1997

Affiliations

Max Planck Institute of Microstructure Physics(Current)

Karsten Gutjahr is an author at Max Planck Institute of Microstructure Physics specializing in applied physics, microelectronics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceMicroelectronicsSurface ScienceCorrosionSinteringMicrostructureMicrofabricationElectronic Devices

Publications per year

1997–2000

Publications

Layer splitting process in hydrogen-implanted Si, Ge, SiC, and diamond substrates

Qiaoling Tong, Karsten Gutjahr, S. Hopfe et al. · Applied Physics Letters · 1997 · 220 citations

Diamond Samples, Engineering, Same Activation Energy +18

Wafer bonding of silicon wafers covered with various surface layers

Marco Wiegand, Manfred Reiche, U. Gösele et al. · Sensors and Actuators A Physical · 2000 · 42 citations

Materials Science, Wafer Scale Processing, Engineering +10

Study of Cu gettering to cavities in separation by implantation of oxygen substrates

Miao Zhang, Chenglu Lin, P.L.F. Hemment et al. · Applied Physics Letters · 1998 · 11 citations

Materials Engineering, Materials Science, Oxygen Substrates +14

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