Publication | Closed Access
Wafer bonding of silicon wafers covered with various surface layers
42
Citations
6
References
2000
Year
Materials ScienceWafer Scale ProcessingEngineeringMicrofabricationSurface ScienceApplied PhysicsChip AttachmentSemiconductor Device FabricationElectronic PackagingWafer BondingMicroelectronicsSurface ProcessingSilicon On Insulator
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