Concepedia

Tantalum silicide films deposited by dc sputtering

J. Angilello, J. E. E. Baglin, F. Cardone, J. Dempsey, F. M. d’Heurle, E. A. Irene, R. Maclnnes, C. S. Petersson, R. Savoy, A. Segmüller,

Journal of Electronic Materials · 1981 · 29 citations · 20 references

DOI

Concepts

References

20

Handbook of Thin Film Technology

L. I. Maissel, R. Glang, Paul P. Budenstein · Journal of The Electrochemical Society · 1971 · 2.8K citations

, , +12

Thin Films—Interdiffusion and Reactions

J. M. Poate, K. N. Tu, Jean-Claude Mayor et al. · Journal of The Electrochemical Society · 1979 · 1.7K citations

, , +12

<i>Physics of Electronic Conduction in Solids</i>

F. J. Blatt, C. S. Koonce · Physics Today · 1969 · 479 citations

, , +12

Reaction of thin metal films with SiO2 substrates

R. Pretoriüs, Joel M. Harris, M.−A. Nicolet · Solid-State Electronics · 1978 · 300 citations

, , +12

Thin Films Deposited by Bias Sputtering

L. I. Maissel, Philipp Schaible · Journal of Applied Physics · 1965 · 170 citations

, , +17