Statistics
Publications
1
Citations
29
H-Index
1
Active since
1981
Affiliations
R. Maclnnes is an author at IBM Research - Thomas J. Watson Research Center specializing in thin films, silicide coatings, and materials engineering.
Publications per year
1981–1981
1
1
Tantalum silicide films deposited by dc sputtering
J. Angilello, J. E. E. Baglin, F. Cardone et al. · Journal of Electronic Materials · 1981 · 29 citations
Natural Sciences, Materials Engineering, Materials Science +12
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