Journal of Applied Physics · 1989 · 21 citations · 6 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsMicroelectronicsThin FilmsDefects In Electronic MaterialsDevice ReliabilityElectronic Material CharacterizationMetalsSemiconductor Device MaterialsSemiconductor ReliabilityElectromigrationElectromigration AnalysisElectromigration ReliabilityFailure Mode InvestigationLog-normal ModelReliability PhysicsThin Film Failure MechanismsWear-out Mechanisms
This work investigates the functional form of the electromigration early-failure distribution in thin Al-1% Si metal films. In a very-large-scale experiment with 28 320 packaged samples, an early-failure group was identified and found to correspond to a log-normal distribution, but with a larger dispersion than that which was typical of the primary, or wear-out, distribution. The total distribution for the failures is approximately bimodal, with the more disperse background distribution dominating at early times. Scanning electron micrographs were obtained to characterize the typical failure mode, which had the same appearance for both groups. Evidence for a test-condition stress-level effect on the form of the accelerated lifetime distribution is also presented.
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Stress generation by electromigration
I. A. Blech, Conyers Herring · Applied Physics Letters · 1976 · 515 citations
Natural Sciences, Electrical Engineering, Materials Science +16