Concepedia

A study on the microstructure and electrical properties of CeO2 thin films for gate dielectric applications

Jung-Ho Yoo, Seok-Woo Nam, Sung-Kwan Kang, Yun-Ha Jeong, Dae‐Hong Ko, Ja-Hum Ku, Hoo-Jeong Lee

Microelectronic Engineering · 2001 · 30 citations · 6 references

DOI

Concepts

References

6

Electrical characteristics of epitaxial CeO2 on Si(111)

Lee Tye, N. A. El-Masry, Toyohiro Chikyow et al. · Applied Physics Letters · 1994 · 158 citations

, , +17

Yttrium oxide/silicon dioxide: a new dielectric structure for VLSI/ULSI circuits

L. Manchanda, M. Gurvitch · IEEE Electron Device Letters · 1988 · 108 citations

, , +17

Dielectric Characteristics of Double Layer Structure of Extremely Thin Ta2 O 5 / SiO2 on Si

Yasushiro Nishioka, Shin’ichiro Kimura, H. Shinriki et al. · Journal of The Electrochemical Society · 1987 · 74 citations

, , +17

Preparation of SrBi<sub>2</sub>Ta<sub>2</sub>O<sub>9</sub> Film at Low Temperatures and Fabrication of a Metal/Ferroelectric/Insulator/Semiconductor Field Effect Transistor Using Al/SrBi<sub>2</sub>Ta<sub>2</sub>O<sub>9</sub>/CeO<sub>2</sub>/Si(100) Structures

Tadahiko Hirai, Yoshihide Fujisaki, Kazuhito Nagashima et al. · Japanese Journal of Applied Physics · 1997 · 70 citations

, , +17

Interfacial reactions in the thin film Y2O3 on chemically oxidized Si(100) substrate systems

Sung-Kwan Kang, Dae‐Hong Ko, Eun-Ha Kim et al. · Thin Solid Films · 1999 · 49 citations

, , +16