Concepedia

H. Shinriki

HS

12

Publications

680

Citations

11

H-Index

1987

Active since

Affiliations

Hitachi (Japan)(Current)

H. Shinriki is an author at Hitachi (Japan) specializing in engineering, materials science, and applied physics.

Top concepts

EngineeringApplied PhysicsMaterial ScienceElectrical EngineeringMicroelectronicsThin FilmsSurface ScienceIntegrated CircuitsChemical EngineeringElectronic Packaging

Publications per year

1987–1998

12

Publications

12

UV-O/sub 3/ and dry-O/sub 2/: Two-step-annealed chemical vapor-deposited Ta/sub 2/O/sub 5/ films for storage dielectrics of 64-Mb DRAMs

H. Shinriki, Masami Nakata · IEEE Transactions on Electron Devices · 1991 · 205 citations

Engineering, Vacuum Device, Photovoltaics +16

Promising storage capacitor structures with thin Ta/sub 2/O/sub 5/ film for low-power high-density DRAMs

H. Shinriki, T. Kisu, S. Kimura et al. · IEEE Transactions on Electron Devices · 1990 · 121 citations

Non-volatile Memory, Engineering, Emerging Memory Technology +16

Dielectric Characteristics of Double Layer Structure of Extremely Thin Ta2 O 5 / SiO2 on Si

Yasushiro Nishioka, Shin’ichiro Kimura, H. Shinriki et al. · Journal of The Electrochemical Society · 1987 · 74 citations

Engineering, Thin Film Process Technology, Double Layer Structure +20

Influence of SiO2 at the Ta2O5/Si interface on dielectric characteristics of Ta2O5 capacitors

Yasushiro Nishioka, H. Shinriki, Kiichiro Mukai · Journal of Applied Physics · 1987 · 57 citations

Materials Science, Sio2 Film, Electrical Engineering +12

Ultra-thin Ta<sub>2</sub>O<sub>5</sub>dielectric film for high-speed bipolar memories

Yasushiro Nishioka, N. Homma, H. Shinriki et al. · IEEE Transactions on Electron Devices · 1987 · 57 citations

Materials Science, Electrical Engineering, Engineering +15

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