Concepedia

Author

Masami Nakata

Tokyo Institute of Technology

Also Known As

M Nakata, M. Nakata, Masami Nakata, Masami Nakata Masami Nakata

33

Publications

532

Citations

11

H-Index

41

Concepts

All Affiliations

Tokyo Institute of TechnologyHitachi (Japan)Princeton University
MN

About

Masami Nakata is an author at Tokyo Institute of Technology specializing in engineering, applied physics, and materials science.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

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2

Applied Physics

11

12

454

3

Medicine

1

1

13

4

Natural Sciences

1

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11

5

Biology

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13

Masami Nakata

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13

Publications

467

Citations

11

H-Index

YearCitations

UV-O/sub 3/ and dry-O/sub 2/: Two-step-annealed chemical vapor-deposited Ta/sub 2/O/sub 5/ films for storage dielectrics of 64-Mb DRAMs

H. Shinriki, Masami Nakata

IEEE Transactions on Electron Devices

1991

205

Preparation of High-Quality Microcrystalline Silicon from Fluorinated Precursors by a Layer-by-Layer Technique

Shun-ichi Ishihara, Deyan He, Masami Nakata,

Japanese Journal of Applied Physics

1993

49

Two-step annealing technique for leakage current reduction in chemical-vapor-deposited Ta/sub 2/O/sub 5/ film

H. Shinriki, Masami Nakata, Yasushiro Nishioka,

IEEE Electron Device Letters

1989

43

Control of nucleation and growth in the preparation of crystals by plasma-enhanced chemical vapour deposition

Masami Nakata, Akira Sakai, Takuya Uematsu,

Philosophical Magazine B

1991

34

Fast growth of hydrogenated amorphous silicon from dichlorosilane

Masami Nakata, S. Wagner

Applied Physics Letters

1994

27

Stoichiometry measurement and electric characteristics of thin-film Ta2O5 insulator for ultra-large-scale integration

Ken D. Shimizu, Masao Katayama, H. Funaki,

Journal of Applied Physics

1993

25

Magnetic properties of Fe/(NiZnCu)Fe/sub 2/O/sub 4/ composite films prepared by aerosoldeposition method

Satoshi Sugimoto, K. Haga, Masami Nakata,

IEEE Transactions on Magnetics

2005

13

Do impurities affect the optoelectronic properties of a-Si:H?

Masami Nakata, S. Wagner, T.M. Peterson

Journal of Non-Crystalline Solids

1993

13

A raised source/drain technology using in-situ P-doped SiGe and B-doped Si for 0.1-μm CMOS ULSIs

T. Uchino, T. Shiba, K. Ohnishi,

2002

13

fruitless is sex-differentially spliced and is important for the courtship behavior and development of silkmoth Bombyx mori

Masumi Ueno, Masami Nakata, Yoshiki Kaneko,

Insect Biochemistry and Molecular Biology

2023

13

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