Shin’ichiro Kimura

Rutile-type TiO2 thin film for high-k gate insulator

Masaru Kadoshima, Masahiko Hiratani, Yasuhiro Shimamoto et al. · Thin Solid Films · 2003 · 244 citations

Natural Sciences, Materials Engineering, Materials Science +14

Local $V_{\rm th}$ Variability and Scalability in Silicon-on-Thin-BOX (SOTB) CMOS With Small Random-Dopant Fluctuation

Nobuyuki Sugii, Ryuta Tsuchiya, Takashi Ishigaki et al. · IEEE Transactions on Electron Devices · 2010 · 109 citations

Engineering, Computer Engineering, Electrical Engineering +17

Leakage‐Current Increase in Amorphous Ta2 O 5 Films Due to Pinhole Growth during Annealing Below 600°C

Shin’ichiro Kimura, Yasushiro Nishioka, Akira Shintani et al. · Journal of The Electrochemical Society · 1983 · 81 citations

Natural Sciences, Materials Engineering, Materials Science +16

Low Temperature Oxidation of Silicon in a Microwave‐Discharged Oxygen Plasma

Shin’ichiro Kimura, Eiichi Murakami, Kiyoshi Miyake et al. · Journal of The Electrochemical Society · 1985 · 79 citations

Natural Sciences, Materials Science, Physics +17

Dielectric Characteristics of Double Layer Structure of Extremely Thin Ta2 O 5 / SiO2 on Si

Yasushiro Nishioka, Shin’ichiro Kimura, H. Shinriki et al. · Journal of The Electrochemical Society · 1987 · 74 citations

Natural Sciences, Materials Engineering, Materials Science +17