Mechanical and Electrical Analysis of Strained Liner Effect in 35 nm Fully Depleted Silicon-on-Insulator Devices with Ultra Thin Silicon Channels

C. Gallon, C. Fenouillet-Béranger, S. Denorme, Vincent Fiori, N. Loubet, A. Vandooren, T. Kormann, M. Broekaart, P. Gouraud, F. Leverd,

Japanese Journal of Applied Physics · 2006 · 26 citations · 2 references

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