Recent developments in the MOCVD and ALD of rare earth oxides and silicates

Anthony C. Jones, Helen C. Aspinall, Paul R. Chalker, Richard J. Potter, Kaupo Kukli, Antti Rahtu, Mikko Ritala, Markku Leskelä

Materials Science and Engineering B · 2005 · 136 citations · 39 references

Concepts

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