Dopant distributions in n-MOSFET structure observed by atom probe tomography

In situ site-specific specimen preparation for atom probe tomography

Keith Thompson, D. Lawrence, DJ Larson et al. · Ultramicroscopy · 2006 · 1.7K citations

Natural Sciences, Physics, Atomic Physics +6

Atom probe tomography

Thomas F. Kelly, Michael K. Miller · Review of Scientific Instruments · 2007 · 857 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +10

Review of Atom Probe FIB-Based Specimen Preparation Methods

Michael K. Miller, K.F. Russell, Keith Thompson et al. · Microscopy and Microanalysis · 2007 · 397 citations

Natural Sciences, Materials Science, Physics +7

Imaging of Arsenic Cottrell Atmospheres Around Silicon Defects by Three-Dimensional Atom Probe Tomography

Keith Thompson, P. Flaitz, Paul Ronsheim et al. · Science · 2007 · 188 citations

Engineering, Electrical Engineering, Materials Science +17

Three-dimensional atom mapping of dopants in Si nanostructures

Keith Thompson, John H. Booske, David J. Larson et al. · Applied Physics Letters · 2005 · 83 citations · Full text

Engineering, Materials Engineering, Materials Science +17