Concepedia

Channeling effect of low energy boron implant in

T.M. Liu, W.G. Oldham

IEEE Electron Device Letters · 1983 · 95 citations · 8 references

Concepts

Natural SciencesElectrical EngineeringPlasma PhysicsIon Channel DisruptionIon Channel EnergeticsIon ChannelsIon ImplantationChanneling EffectsImplantation-induced Defect FormationIon Channel FunctionIon Implantation EffectsLow-energy Ion Implantation

Abstract

Unintentional ion channeling in low energy ion implantation of boron into

References

8

Ion implantation in semiconductors—Part I: Range distribution theory and experiments

J. F. Gibbons · Proceedings of the IEEE · 1968 · 243 citations

Engineering, Materials Engineering, Materials Science +17

Channeling of medium-mass ions through silicon

F. H. Eisen · Canadian Journal of Physics · 1968 · 209 citations

Natural Sciences, Materials Science, Physics +11

Recrystallization of implanted amorphous silicon layers. I. Electrical properties of silicon implanted with BF+2 or Si++B+

M. Y. Tsai, B. G. Streetman · Journal of Applied Physics · 1979 · 174 citations

Engineering, Materials Engineering, Materials Science +17

Simulation of doping processes

H. Ryssel, K. Haberger, Klaus H. Hoffmann et al. · IEEE Transactions on Electron Devices · 1980 · 85 citations

Engineering, Electrical Engineering, Materials Science +17

Channeling and dechanneling of ion-implanted phosphorus in silicon

V.G.K. Reddi, J. D. Sansbury · Journal of Applied Physics · 1973 · 43 citations

Natural Sciences, Materials Science, Physics +9