K. Haberger

Simulation of doping processes

H. Ryssel, K. Haberger, Klaus H. Hoffmann et al. · IEEE Transactions on Electron Devices · 1980 · 85 citations

Engineering, Electrical Engineering, Materials Science +17

High concentration effects of ion implanted boron in silicon

H. Ryssel, K. Müller, K. Haberger et al. · Applied Physics A · 1980 · 78 citations

Engineering, Materials Engineering, Materials Science +10

Ion-beam sensitivity of polymer resists

H. Ryssel, K. Haberger, H.-G. Kranz · Journal of Vacuum Science and Technology · 1981 · 64 citations

Natural Sciences, Materials Engineering, Materials Science +11

Maskless patterning of indium tin oxide layer for flat panel displays by diode-pumped Nd:YLF laser irradiation

M. Takai, D. Bollmann, K. Haberger · Applied Physics Letters · 1994 · 55 citations

Engineering, Materials Engineering, Materials Science +17

Arsenic-implanted polysilicon layers

H. Ryssel, H. Iberl, Michael Bleier et al. · Applied Physics A · 1981 · 39 citations