Rare-earth oxide thin films for gate dielectrics in microelectronics

High-κ gate dielectrics: Current status and materials properties considerations

G. D. Wilk, Robert M. Wallace, J. Anthony · Journal of Applied Physics · 2001 · 5.9K citations

Engineering, Materials Engineering, Materials Science +17

Band offsets of wide-band-gap oxides and implications for future electronic devices

John Robertson · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 2K citations

Engineering, Materials Engineering, Materials Science +17

Thermodynamic stability of binary oxides in contact with silicon

K. J. Hubbard, Darrell G. Schlom · Journal of materials research/Pratt's guide to venture capital sources · 1996 · 1.2K citations

Natural Sciences, Materials Engineering, Materials Science +14

Atomic layer deposition of transition metals

Booyong S. Lim, Antti Rahtu, Roy G. Gordon · Nature Materials · 2003 · 656 citations

Natural Sciences, Materials Engineering, Materials Science +11

Ultrathin high-K metal oxides on silicon: processing, characterization and integration issues

E. P. Gusev, E. Cartier, D. A. Buchanan et al. · Microelectronic Engineering · 2001 · 386 citations

Natural Sciences, Materials Engineering, Materials Science +12