Etch rates of (100), (111) and (110) single-crystal silicon in TMAH measured in situ by laser reflectance interferometry

Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: I . Orientation Dependence and Behavior of Passivation Layers

H. Seidel, L. Csepregi, A. Heuberger et al. · Journal of The Electrochemical Society · 1990 · 1.6K citations

Natural Sciences, Materials Engineering, Materials Science +17

Anisotropic etching of silicon in TMAH solutions

Osamu Tabata, Ryouji Asahi, Hirofumi Funabashi et al. · Sensors and Actuators A Physical · 1992 · 458 citations

Engineering, Materials Engineering, Materials Science +14

TMAH/IPA anisotropic etching characteristics

Á. Merlos, M.C. Acero, Ming Bao et al. · Sensors and Actuators A Physical · 1993 · 183 citations

Engineering, Materials Engineering, Materials Science +9

Anisotropic etching rates of single-crystal silicon for TMAH water solution as a function of crystallographic orientation

Kazuo Sato, Mitsuhiro Shikida, Takashi Yamashiro et al. · Sensors and Actuators A Physical · 1999 · 153 citations

Natural Sciences, Materials Engineering, Materials Science +16

Probability and Statistics for the Engineering, Computing, and Physical Sciences

Ray A. Waller, Edward R. Dougherty · Technometrics · 1992 · 145 citations

Natural Sciences, Mathematics, Probability Theory +11