A. Hanneborg

Guard ring design for high voltage operation of silicon detectors

L. Evensen, A. Hanneborg, B.S. Avset et al. · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 1993 · 84 citations

Engineering, Electrical Engineering, Microelectronics +13

Silicon-to-silicon anodic bonding with a borosilicate glass layer

A. Hanneborg, Martin Nese · Journal of Micromechanics and Microengineering · 1991 · 71 citations

Engineering, Materials Engineering, Materials Science +16

An integrated capacitive pressure sensor with frequency-modulated output

A. Hanneborg, Thor-Erik Hansen, Elmer V. Carlson et al. · Sensors and Actuators · 1986 · 52 citations

Engineering, Electrical Engineering, Instrumentation +13

Etch rates of (100), (111) and (110) single-crystal silicon in TMAH measured in situ by laser reflectance interferometry

E. Steinsland, T. G. Finstad, A. Hanneborg · Sensors and Actuators A Physical · 2000 · 50 citations

Natural Sciences, Materials Engineering, Materials Science +16

Anodic bonding of silicon to silicon wafers coated with aluminium, silicon oxide, polysilicon or silicon nitride

Martin Nese, A. Hanneborg · Sensors and Actuators A Physical · 1993 · 49 citations

Engineering, Materials Engineering, Materials Science +14