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76
Boron etch-stop in TMAH solutions
E. Steinsland, Martin Nese, A. Hanneborg et al. · Sensors and Actuators A Physical · 1996 · 49 citations
Fredrik Forsberg, Adriana Lapadatu, Gjermund Kittilsland et al. · IEEE Journal of Selected Topics in Quantum Electronics · 2014 · 42 citations · Full text
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