TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference

Effect of phonon interactions on limiting the f.Q product of micromechanical resonators

Roozbeh Tabrizian, Mina Rais‐Zadeh, Farrokh Ayazi · 2009 · 181 citations

Natural Sciences, Materials Science, Physics +17

Energy loss in MEMS resonators and the impact on inertial and RF devices

Marc S. Weinberg, Rob N. Candler, Saurabh A. Chandorkar et al. · 2009 · 90 citations

Engineering, Electrical Engineering, Mechanical Engineering +16

Single-chip precision oscillators based on multi-frequency, high-Q aluminum nitride MEMS resonators

K.E. Wojciechowski, Roy H. Olsson, Melanie R. Tuck et al. · 2009 · 56 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +16

Harvesting energy from vehicle wheels

Ghaithaa Manla, N.M. White, John Tudor · 2009 · 50 citations

Engineering, Automotive Engineering, Electrical Engineering +14

An electrostatic energy harvester with electret bias

Einar Halvorsen, Eskild R. Westby, Svein Husa et al. · 2009 · 43 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +12