Publication | Closed Access
Energy loss in MEMS resonators and the impact on inertial and RF devices
89
Citations
52
References
2009
Year
Rf DevicesEngineeringRadio FrequencyMechanical EngineeringMicroactuatorMems GyrosMicro-electromechanical SystemMicromachinesRadio Frequency Micro-electromechanical SystemsEnergy Loss MechanismsElectrical EngineeringEnergy HarvestingHigh-frequency DeviceMechatronicsMicroelectronicsMicrowave EngineeringMems ResonatorsMicrofabricationNano Electro Mechanical SystemEnergy LossRf Subsystem
In this paper, we review the current understanding of energy loss mechanisms in micromachined (MEMS and NEMS) devices. We describe the importance of high quality factor (Q) to the performance of MEMS gyros and MEMS resonators used in radio-frequency applications.
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