Fabrication and initial characterization of ultrahigh aspect ratio vias in gold using the helium ion microscope

Abstract

Toward the end goal of creating transducers with nanometer scale sensing features, the helium ion microscope (HIM) has been employed to create and characterize high aspect ratio features in gold films. The HIM has a spot size less than 1 nm, uses a chemically inert noble gas (He), which does not deposit/implant any species that may contaminate the material being patterned, and is able to rapidly generate arrays of vias in Au. Hence, the HIM is an ideal tool to generate these ultrahigh aspect ratio features. The authors characterize the vias, also using HIM, by measurements of feature size, lateral milling resolution, sidewall angle, and fabrication speed. Two novel methods were employed to enable the characterization due to the very small size of the features. A significant reduction in via width is achieved, as compared with traditional focused ion beam milling.