Shawn McVey

Subsurface damage from helium ions as a function of dose, beam energy, and dose rate

Richard H. Livengood, Shida Tan, Yuval Greenzweig et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2009 · 217 citations

High Resolution Images, Engineering, Microscopy +19

An Introduction to the Helium Ion Microscope

John Notte, Bill Ward, Nick Economou et al. · AIP conference proceedings · 2007 · 76 citations

Engineering, Microscopy, Ion Beam Instrumentation +19

Understanding imaging modes in the helium ion microscope

Larry Scipioni, Colin A. Sanford, John Notte et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2009 · 68 citations

Engineering, Microscopy, Electron Diffraction +16

The Prospects of a Subnanometer Focused Neon Ion Beam

F. Rahman, Shawn McVey, Louis Farkas et al. · Scanning · 2011 · 67 citations

Gas field ion source and liquid metal ion source charged particle material interaction study for semiconductor nanomachining applications

Shida Tan, Richard H. Livengood, Darryl Shima et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 65 citations

Engineering, Electron-beam Lithography, Ion Beam Technology +20