Subsurface damage from helium ions as a function of dose, beam energy, and dose rate

Richard H. Livengood, Shida Tan, Yuval Greenzweig, +2

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

High Resolution ImagesEngineeringMicroscopyHelium IonRadiation Exposure +17

An Introduction to the Helium Ion Microscope

John Notte, Bill Ward, Nick Economou, +11

AIP conference proceedings

EngineeringMicroscopyIon Beam InstrumentationElectron Cloud EffectsHelium Atoms +17

Understanding imaging modes in the helium ion microscope

Larry Scipioni, Colin A. Sanford, John Notte, +2

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

EngineeringMicroscopyElectron DiffractionContrast ImagingElectron Microscopy +14

The Prospects of a Subnanometer Focused Neon Ion Beam

F. Rahman, Shawn McVey, Louis Farkas, +3

Scanning

Gas field ion source and liquid metal ion source charged particle material interaction study for semiconductor nanomachining applications

Shida Tan, Richard H. Livengood, Darryl Shima, +2

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

EngineeringElectron-beam LithographyIon Beam TechnologyVacuum DeviceIon Process +18

An assessment of lead eyewear in interventional radiology

Shawn McVey, A. Sandison, David Sutton

Journal of Radiological Protection

Health SciencesOphthalmologyEye TrackingLead EyewearRadiation Dose +11

The neon gas field ion source—a first characterization of neon nanomachining properties

Richard H. Livengood, Shida Tan, Roy Hallstein, +3

Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment

Materials ScienceEngineeringNanomaterialsNanotechnologyGas Sensor +5

Nanomachining with a focused neon beam: A preliminary investigation for semiconductor circuit editing and failure analysis

Shida Tan, Richard H. Livengood, P. Hack, +4

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

EngineeringIon Beam InstrumentationNanocomputingIon ImplantationNanoelectronics +18

Rapid fabrication of solid-state nanopores with high reproducibility over a large area using a helium ion microscope

Deying Xia, Chuong Huynh, Shawn McVey, +4

Nanoscale

An Introduction to Helium Ion Microscopy

John Notte, R. Hill, Shawn McVey, +3

Microscopy and Microanalysis

– August 3EngineeringPhysicsMicroscopyMicroanalysis 2006 +10