Richard H. Livengood

Author

Intel (United States)

Also Known As

Richard H. Livengood, Richard Livengood

Publications

749

Citations

H-Index

Concepts

All Affiliations

Intel (United States)Mission College Carl Zeiss (United States)Intel (Israel)Oak Ridge National Laboratory

About

Richard H. Livengood is an author at Intel (United States) specializing in applied physics, engineering, and instrumentation.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	11	11	571
2	Applied Physics	11	11	559
3	Natural Sciences	3	3	56
4	Education	1	1	31
5	Medicine	1	1	217

Richard H. Livengood

Publications

702

Citations

H-Index

Page 1

	Year	Citations
Subsurface damage from helium ions as a function of dose, beam energy, and dose rate Richard H. Livengood, Shida Tan, Yuval Greenzweig, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena High Resolution ImagesEngineeringMicroscopyHelium IonRadiation Exposure	2009	217
The Prospects of a Subnanometer Focused Neon Ion Beam F. Rahman, Shawn McVey, Louis Farkas, Scanning	2011	67
Gas field ion source and liquid metal ion source charged particle material interaction study for semiconductor nanomachining applications Shida Tan, Richard H. Livengood, Darryl Shima, Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena EngineeringElectron-beam LithographyIon Beam TechnologyVacuum DeviceIon Process	2010	65
Progress in extreme ultraviolet mask repair using a focused ion beam Ted Liang, Alan R. Stivers, Richard H. Livengood, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena Ion ImplantationEngineeringElectron-beam LithographyOphthalmologyMicrofabrication	2000	56
The neon gas field ion source—a first characterization of neon nanomachining properties Richard H. Livengood, Shida Tan, Roy Hallstein, Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment Materials ScienceEngineeringNanomaterialsNanotechnologyGas Sensor	2011	50
Nanomachining with a focused neon beam: A preliminary investigation for semiconductor circuit editing and failure analysis Shida Tan, Richard H. Livengood, P. Hack, Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena EngineeringIon Beam InstrumentationNanocomputingIon ImplantationNanoelectronics	2011	42
Laser-Assisted Focused He<sup>+</sup> Ion Beam Induced Etching with and without XeF<sub>2</sub> Gas Assist Michael G. Stanford, Kyle Mahady, Brett B. Lewis, ACS Applied Materials & Interfaces	2016	35
Probe current distribution characterization technique for focused ion beam Shida Tan, Richard H. Livengood, Yuval Greenzweig, Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena Electrical EngineeringIon ImplantationEngineeringElectron-beam LithographyIon Beam Technology	2012	31
Helium ion microscope invasiveness and imaging study for semiconductor applications Richard H. Livengood, Yuval Greenzweig, Ted Liang, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena Materials ScienceEngineeringElectron MicroscopyPhysicsMicroscopy	2007	28
Application of advanced micromachining techniques for the characterization and debug of high performance microprocessors Richard H. Livengood, Paul Winer, Valluri Rao Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena Advanced Micromachining TechniquesHardware TrojanEngineeringFlip Chip PackageComputer Architecture	1999	25

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