Richard H. Livengood

Subsurface damage from helium ions as a function of dose, beam energy, and dose rate

Richard H. Livengood, Shida Tan, Yuval Greenzweig et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2009 · 217 citations

High Resolution Images, Engineering, Microscopy +19

The Prospects of a Subnanometer Focused Neon Ion Beam

F. Rahman, Shawn McVey, Louis Farkas et al. · Scanning · 2011 · 67 citations

Gas field ion source and liquid metal ion source charged particle material interaction study for semiconductor nanomachining applications

Shida Tan, Richard H. Livengood, Darryl Shima et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 65 citations

Engineering, Electron-beam Lithography, Ion Beam Technology +20

Progress in extreme ultraviolet mask repair using a focused ion beam

Ted Liang, Alan R. Stivers, Richard H. Livengood et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 56 citations

Ion Implantation, Engineering, Electron-beam Lithography +13

The neon gas field ion source—a first characterization of neon nanomachining properties

Richard H. Livengood, Shida Tan, Roy Hallstein et al. · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 2011 · 50 citations

Materials Science, Engineering, Nanomaterials +7