Concepedia
Statistics
Publications
22
Citations
513
H-Index
14
Active since
1977
Affiliations
Intel (United States)(Current)
Lawrence Livermore National Laboratory
Lawrence Berkeley National Laboratory
Motorola (United States)
Sandia National Laboratories California
Alan R. Stivers is an author at Intel (United States) specializing in materials science, engineering, and mask design.
Publications per year
1977–2009
Advanced photolithographic mask repair using electron beams
Ted Liang, Eric Frendberg, Barry Lieberman et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 75 citations
Engineering, Surgery, Microelectromechanical Systems +14
A study of oxide traps and interface states of the silicon-silicon dioxide interface
Alan R. Stivers, C. T. Sah · Journal of Applied Physics · 1980 · 65 citations
Engineering, Electrical Engineering, Materials Science +16
Progress in extreme ultraviolet mask repair using a focused ion beam
Ted Liang, Alan R. Stivers, Richard H. Livengood et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 56 citations
Engineering, Materials Engineering, Materials Science +15
Damage-free mask repair using electron-beam-induced chemical reactions
Ted Liang, Alan R. Stivers · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 39 citations
Engineering, Materials Engineering, Materials Science +16
EUV mask absorber characterization and selection
Pei-yang Yan, Guojing Zhang, Patrick Kofron et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 24 citations
Natural Sciences, Materials Engineering, Materials Science +17
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