Concepedia

Eric Frendberg

EF

Statistics

Publications

3

Citations

101

H-Index

3

Active since

2004

Affiliations

Intel (United States)(Current)

Eric Frendberg is an author at Intel (United States) specializing in mask design, microfabrication, and electron beam lithography.

Publications per year

2004–2020

3

Publications

3

Advanced photolithographic mask repair using electron beams

Ted Liang, Eric Frendberg, Barry Lieberman et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 75 citations

, , +14

E-beam mask repair: fundamental capability and applications

Ted Liang, Eric Frendberg, Daniel J. Bald et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 14 citations · Full text

, , +12

EUV mask infrastructure and actinic pattern mask inspection

Ted Liang, Yoshihiro Tezuka, Marieke F. Jager et al. · 2020 · 12 citations

, , +13

1–3 of 3