Concepedia
Statistics
Publications
30
Citations
716
H-Index
17
Active since
2000
Affiliations
Intel (United States)(Current)
Lawrence Berkeley National Laboratory
Mission College
Lawrence Livermore National Laboratory
University of California, Berkeley
Ted Liang is an author at Intel (United States) specializing in materials engineering, materials science, and mask fabrication.
Publications per year
2000–2020
Advanced photolithographic mask repair using electron beams
Ted Liang, Eric Frendberg, Barry Lieberman et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 75 citations
Engineering, Surgery, Microelectromechanical Systems +14
EUV progress toward HVM readiness
Britt Anne Turkot, Steven L. Carson, Anna Lio et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 65 citations
Engineering, Manufacturing Engineering, Materials Engineering +9
Progress in extreme ultraviolet mask repair using a focused ion beam
Ted Liang, Alan R. Stivers, Richard H. Livengood et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 56 citations
Engineering, Materials Engineering, Materials Science +15
Inhibiting spontaneous etching of nanoscale electron beam induced etching features: Solutions for nanoscale repair of extreme ultraviolet lithography masks
Matthew Lassiter, Ted Liang, Philip D. Rack · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 45 citations
Engineering, Materials Engineering, Materials Science +17
Damage-free mask repair using electron-beam-induced chemical reactions
Ted Liang, Alan R. Stivers · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 39 citations
Engineering, Materials Engineering, Materials Science +16
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