Statistics
Publications
4
Citations
118
H-Index
4
Active since
2003
Affiliations
Steven L. Carson is an author at University of Florida specializing in impedance measurement, electrical measurement, and spectroscopy.
Publications per year
2003–2016
4
4
On the Error Structure of Impedance Measurements
Steven L. Carson, Mark E. Orazem, O.D. Crisalle et al. · Journal of The Electrochemical Society · 2003 · 30 citations
Compensation of overlay errors due to mask bending and non-flatness for EUV masks
Manish Chandhok, Sanjay Goyal, Steven L. Carson et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 13 citations
Engineering, Manufacturing Engineering, Materials Engineering +15
On the Error Structure of Impedance Measurements
Steven L. Carson, Mark E. Orazem, O.D. Crisalle et al. · Journal of The Electrochemical Society · 2003 · 10 citations
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