Yoshihiro Tezuka

Simultaneous angle-resolved measurement of the band structure of single-crystal graphite by an improved two-dimensional display analyzer

Hiroyuki Nishimoto, Hiroshi Daimon, S. Suga et al. · Review of Scientific Instruments · 1993 · 37 citations

Optical Materials, Engineering, Microscopy +21

Surface electronic structure of ordered alkali- and noble metal-overlayers on Si(111)

Taichi Okuda, Hiroshi Daimon, S. Suga et al. · Applied Surface Science · 1997 · 32 citations

Materials Science, Surface Characterization, Engineering +8

Actinic inspection of extreme ultraviolet programed multilayer defects and cross-comparison measurements

Kenneth A. Goldberg, Anton Barty, Yanwei Liu et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 30 citations

Ultraviolet Light, Short Wavelength Optic, Mask Inspection Tools +24

High-speed actinic EUV mask blank inspection with dark-field imaging

Tsuneo Terasawa, Yoshihiro Tezuka, Masaaki Ito et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 30 citations

Engineering, Microscopy, Optical Testing +26

Actinic detection of multilayer defects on EUV mask blanks using LPP light source and dark-field imaging

Yoshihiro Tezuka, Masaaki Ito, Tsuneo Terasawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 21 citations

Optical Materials, Engineering, Electron-beam Lithography +17