21
Publications
594
Citations
13
H-Index
1994
Active since
Masaaki Ito is an author at Association of Super-Advanced Electronics specializing in engineering, applied physics, and computational imaging.
Top concepts
EngineeringApplied PhysicsMedicineInstrumentationOptical PropertiesComputational ImagingMicroscopyOphthalmologyRadiologyOptical Diagnostics
Publications per year
1994–2022
21
21
Impact of EUV light scatter on CD control as a result of mask density changes
Christof G. Krautschik, Masaaki Ito, Iwao Nishiyama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 39 citations
Electrical Engineering, Power Spectral Density, Engineering +8
Christof G. Krautschik, Masaaki Ito, Iwao Nishiyama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 27 citations
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