Author
Masaaki Ito
Also Known As
Atsuo Maeda, Ito, Masaaki, Ken Kitagawa, Masaaki ITO, Masaaki Ito, Masaaki Ito Masaaki Ito, Tetsuya Haruna
117
Publications
802
Citations
13
H-Index
97
Concepts
All Affiliations
| # | Concept | H-Index | Publications | Citations |
|---|---|---|---|---|
1 | Engineering | 12 | 15 | 505 |
2 | Applied Physics | 7 | 7 | 124 |
3 | Medicine | 6 | 6 | 314 |
4 | Health Sciences | 3 | 3 | 55 |
5 | Natural Sciences | 1 | 1 | 13 |
Masaaki Ito
×
21
Publications
594
Citations
13
H-Index
| Year | Citations | |
|---|---|---|
2011 | 172 | |
2010 | 81 | |
Impact of EUV light scatter on CD control as a result of mask density changes Christof G. Krautschik, Masaaki Ito, Iwao Nishiyama, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Electrical EngineeringPower Spectral DensityEngineeringCd ControlComputer Engineering | 2002 | 39 |
2004 | 30 | |
2001 | 27 | |
2021 | 22 | |
2001 | 21 | |
2004 | 21 | |
2003 | 21 | |
2004 | 20 |
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