Christof G. Krautschik

Impact of EUV light scatter on CD control as a result of mask density changes

Christof G. Krautschik, Masaaki Ito, Iwao Nishiyama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 39 citations

Natural Sciences, Electrical Engineering, Physics +11

Study of the length dependence of frequency-doubled light in optical fibers

B. Batdorf, Christof G. Krautschik, Ulf L. Österberg et al. · Optics Communications · 1989 · 32 citations

Natural Sciences, Physics, Optics +15

Implementing flare compensation for EUV masks through localized mask CD resizing

Christof G. Krautschik, Manish Chandhok, Guojing Zhang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 27 citations

Engineering, Computer Engineering, Electrical Engineering +10

<title>Impact of the EUV mask phase response on the asymmetry of Bossung curves as predicted by rigorous EUV mask simulations</title>

Christof G. Krautschik, Masaaki Ito, Iwao Nishiyama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 27 citations

Natural Sciences, Materials Engineering, Materials Science +14

Direct test of a model of efficient second-harmonic generation in glass optical fibers

V. Mizrahi, Ulf L. Österberg, Christof G. Krautschik et al. · Applied Physics Letters · 1988 · 25 citations

Natural Sciences, Materials Science, Optical Materials +13