Tsuneo Terasawa

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Active since

1980

Affiliations

National Institute of Advanced Industrial Science and Technology(Current)

Hitachi (Japan)

Association of Super-Advanced Electronics

Ebara (Japan)

Tohoku University

Tsuneo Terasawa is an author at National Institute of Advanced Industrial Science and Technology specializing in engineering, materials science, and defect detection.

Publications per year

1980–2014

Publications

Imaging Characteristics of Multi-Phase-Shifting and Halftone Phase-Shifting Masks

Tsuneo Terasawa, Norio Hasegawa, Hiroshi Fukuda et al. · Japanese Journal of Applied Physics · 1991 · 78 citations

Natural Sciences, Radiology, Biomedical Optics +12

0.3-micron Optical Lithography Using A Phase-Shifting Mask

Tsuneo Terasawa, Norio Hasegawa, Toshiei Kurosaki et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1989 · 69 citations

Engineering, Manufacturing Engineering, Microfabrication +14

Selete's EUV program: progress and challenges

Ichiro Mori, Osamu Suga, Iwao Nishiyama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 50 citations

Engineering, Manufacturing Engineering, Digital Fabrication +10

Steady-State Vibrations of a Beam on a Pasternak Foundation for Moving Loads

Hideo Saitô, Tsuneo Terasawa · Journal of Applied Mechanics · 1980 · 45 citations

Engineering, Civil Engineering, Mechanical Engineering +17

Development of actinic full-field EUV mask blank inspection tool at MIRAI-Selete

Tsuneo Terasawa, Takeshi Yamane, Toshihiko Tanaka et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 42 citations

Engineering, Electrical Engineering, Instrumentation +11

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