Tsuneo Terasawa

Publications

Citations

H-Index

1980

Active since

Affiliations

National Institute of Advanced Industrial Science and Technology(Current)

Hitachi (Japan)

Association of Super-Advanced Electronics

Ebara (Japan)

Tohoku University

Tsuneo Terasawa is an author at National Institute of Advanced Industrial Science and Technology specializing in engineering, applied physics, and instrumentation.

Top concepts

EngineeringApplied PhysicsMicroscopyInstrumentationOphthalmologyOptical PropertiesMedicineMicrofabricationMicroelectronicsCrystalline Defects

Publications per year

1980–2014

Publications

Imaging Characteristics of Multi-Phase-Shifting and Halftone Phase-Shifting Masks

Tsuneo Terasawa, Norio Hasegawa, Hiroshi Fukuda et al. · Japanese Journal of Applied Physics · 1991 · 78 citations

Engineering, Medical Imaging, Halftone Phase-shifting Masks +13

0.3-micron Optical Lithography Using A Phase-Shifting Mask

Tsuneo Terasawa, Norio Hasegawa, Toshiei Kurosaki et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1989 · 69 citations

Selete's EUV program: progress and challenges

Ichiro Mori, Osamu Suga, Iwao Nishiyama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 50 citations

Engineering, Lithography Design, Lithography Integration +18

Steady-State Vibrations of a Beam on a Pasternak Foundation for Moving Loads

Hideo Saitô, Tsuneo Terasawa · Journal of Applied Mechanics · 1980 · 45 citations

Engineering, Moving Loads, Mechanical Engineering +19

Development of actinic full-field EUV mask blank inspection tool at MIRAI-Selete

Tsuneo Terasawa, Takeshi Yamane, Toshihiko Tanaka et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 42 citations

Light Field Imaging, Ophthalmology, Microscopy +11

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