Ichiro Mori

Selete's EUV program: progress and challenges

Ichiro Mori, Osamu Suga, Iwao Nishiyama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 50 citations

Engineering, Lithography Design, Lithography Integration +18

Transparent ZnO:Al films prepared by co-sputtering of ZnO:Al with either a Zn or an Al target

Kikuo Tominaga, Masahiro Kataoka, Haruhiko Manabe et al. · Thin Solid Films · 1996 · 47 citations

Materials Science, Materials Engineering, Aluminium Nitride +10

Film properties of ZnO:Al prepared by cosputtering of ZnO:Al and either Zn or Al targets

Kikuo Tominaga, Haruhiko Manabe, N. Umezu et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 43 citations

Materials Science, Materials Engineering, Chemical Engineering +15

EUV actinic blank inspection: from prototype to production

Anna Tchikoulaeva, Hiroki Miyai, Tomohiro Suzuki et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 38 citations

Actinic Metrology Tools, Engineering, Inspection +10

Preparation of conductive ZnO:Al films by a facing target system with a strong magnetic field

Kikuo Tominaga, Masahiro Kataoka, Tetsuya Ueda et al. · Thin Solid Films · 1994 · 38 citations

Materials Science, Magnetism, Aluminium Nitride +8