Selete's EUV program: progress and challenges

Ichiro Mori, Osamu Suga, Iwao Nishiyama, +5

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

EngineeringLithography DesignLithography IntegrationElectron-beam LithographyRelated Mask Technology +16

Transparent ZnO:Al films prepared by co-sputtering of ZnO:Al with either a Zn or an Al target

Kikuo Tominaga, Masahiro Kataoka, Haruhiko Manabe, +2

Thin Solid Films

Materials ScienceMaterials EngineeringAluminium NitrideEngineeringOxide Electronics +8

Film properties of ZnO:Al prepared by cosputtering of ZnO:Al and either Zn or Al targets

Kikuo Tominaga, Haruhiko Manabe, N. Umezu, +3

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Materials ScienceMaterials EngineeringChemical EngineeringAl DonorsEngineering +13

EUV actinic blank inspection: from prototype to production

Anna Tchikoulaeva, Hiroki Miyai, Tomohiro Suzuki, +7

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

Actinic Metrology ToolsEngineeringInspectionNondestructive TestingElectron-beam Lithography +8

Preparation of conductive ZnO:Al films by a facing target system with a strong magnetic field

Kikuo Tominaga, Masahiro Kataoka, Tetsuya Ueda, +3

Thin Solid Films

Materials ScienceMagnetismAluminium NitrideEngineeringNanotechnology +6

Piezoelectrically driven <i>X</i> <i>Y</i>θ table for submicron lithography systems

Kazuyoshi Sugihara, Ichiro Mori, Toru Tojo, +3

Review of Scientific Instruments

Submicron Lithography SystemsElectronic DevicesEngineeringMechanical ControlMicrofabrication +13

ITO films prepared by facing target sputtering system

Kikuo Tominaga, Tetsuya Ueda, Takahiro Ao, +2

Thin Solid Films

EngineeringTarget FabricationSurface ScienceApplied PhysicsThin Films +3

The capability of high magnification review function for EUV actinic blank inspection tool

Hiroki Miyai, Tomohiro Suzuki, Kiwamu Takehisa, +5

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

EngineeringBlank Inspection ToolsElectron-beam LithographyDefect ToleranceImage Analysis +17

Reperfusion after a Two-Hour Period of Pulmonary Artery Occlusion Causes Pulmonary Necrosis

Hiroe Nakazawa, Ichiro Mori, Yasuyo Ohta, +1

American Review of Respiratory Disease

Actinic phase defect detection and printability analysis for patterned EUVL mask

Tsuneo Terasawa, Takeshi Yamane, Toshihiko Tanaka, +3

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

EngineeringElectron-beam LithographyMicroscopyMechanical EngineeringMultilayer Defects +16