Osamu Suga

Statistics

Publications

Citations

348

H-Index

Active since

2007

Affiliations

National Institute of Advanced Industrial Science and Technology(Current)

Osamu Suga is an author at National Institute of Advanced Industrial Science and Technology specializing in materials science, materials engineering, and engineering.

Publications per year

2007–2011

Publications

Selete's EUV program: progress and challenges

Ichiro Mori, Osamu Suga, Iwao Nishiyama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 50 citations

Engineering, Manufacturing Engineering, Digital Fabrication +10

Development of actinic full-field EUV mask blank inspection tool at MIRAI-Selete

Tsuneo Terasawa, Takeshi Yamane, Toshihiko Tanaka et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 42 citations

Engineering, Electrical Engineering, Instrumentation +11

Development of new FIB technology for EUVL mask repair

Fumio Aramaki, Takashi Ogawa, Osamu Matsuda et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 32 citations

Engineering, Materials Engineering, Materials Science +11

Actinic phase defect detection and printability analysis for patterned EUVL mask

Tsuneo Terasawa, Takeshi Yamane, Toshihiko Tanaka et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 24 citations

Natural Sciences, Materials Engineering, Materials Science +17

Carbon contamination of EUV mask: film characterization, impact on lithographic performance, and cleaning

Yasushi Nishiyama, Toshihisa Anazawa, Hiroaki Oizumi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 23 citations

Natural Sciences, Materials Engineering, Materials Science +17

1–5 of 17