Concepedia

Fumio Aramaki

FA

4

Publications

71

Citations

4

H-Index

2008

Active since

Affiliations

Dai Nippon Printing (Japan)(Current)

Fumio Aramaki is an author at Dai Nippon Printing (Japan) specializing in materials science, engineering, and crystalline defects.

Top concepts

EngineeringMaterial ScienceOphthalmologyApplied PhysicsCrystalline DefectsMedicineWound HealingPhotochemistryOptoelectronicsDefect Tolerance

Publications per year

2008–2014

4

Publications

4

Development of new FIB technology for EUVL mask repair

Fumio Aramaki, Takashi Ogawa, Osamu Matsuda et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 31 citations

Materials Science, Ion Implantation, Engineering +14

Photomask repair technology by using gas field ion source

Fumio Aramaki, Tomokazu Kozakai, Osamu Matsuda et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 17 citations

Engineering, Electron-beam Lithography, Chemical Engineering +17

Study of EUVL mask defect repair using FIB-GAE method

Tsuyoshi Amano, Yasushi Nishiyama, Hiroyuki Shigemura et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 12 citations

Materials Science, Fib-gae Method, Ion Implantation +10

Performance of GFIS mask repair system for various mask materials

Fumio Aramaki, Tomokazu Kozakai, Osamu Matsuda et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 11 citations

Rows per page

1–4 of 4