Fumio Aramaki - Concepedia

Author

Fumio Aramaki

Also Known As

Fumio Aramaki

Publications

103

Citations

H-Index

Concepts

All Affiliations

Fumio Aramaki is an author at Dai Nippon Printing (Japan) specializing in materials science, engineering, and crystalline defects.

#	Concept	H-Index	Publications	Citations
1	Engineering	3	3	60
2	Applied Physics	2	2	48
3	Medicine	1	1	31
4	Chemical Engineering	1	1	17
5	Electrical Engineering	1	1	17

Fumio Aramaki

Publications

Citations

H-Index

Page 1

	Year	Citations
Development of new FIB technology for EUVL mask repair Fumio Aramaki, Takashi Ogawa, Osamu Matsuda, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Materials ScienceIon ImplantationEngineeringElectron-beam LithographyOphthalmology	2011	31
Photomask repair technology by using gas field ion source Fumio Aramaki, Tomokazu Kozakai, Osamu Matsuda, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringElectron-beam LithographyChemical EngineeringIon ImplantationPhotoelectric Sensor	2012	17
Study of EUVL mask defect repair using FIB-GAE method Tsuyoshi Amano, Yasushi Nishiyama, Hiroyuki Shigemura, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Materials ScienceFib-gae MethodIon ImplantationEngineeringCrystalline Defects	2008	12
Performance of GFIS mask repair system for various mask materials Fumio Aramaki, Tomokazu Kozakai, Osamu Matsuda, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE	2014	11

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