Concepedia

Yasushi Nishiyama

YN

Statistics

Publications

4

Citations

65

H-Index

4

Active since

1988

Affiliations

Kyushu Institute of Technology(Current)

Yasushi Nishiyama is an author at Kyushu Institute of Technology specializing in materials science, materials engineering, and natural sciences.

Publications per year

1988–2008

4

Publications

4

Carbon contamination of EUV mask: film characterization, impact on lithographic performance, and cleaning

Yasushi Nishiyama, Toshihisa Anazawa, Hiroaki Oizumi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 23 citations

Natural Sciences, Materials Engineering, Materials Science +17

Repair specification study for half-pitch 32-nm patterns for EUVL

Hajime Aoyama, Tsuyoshi Amano, Yasushi Nishiyama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 17 citations

Engineering, Materials Engineering, Materials Science +17

Light-harvesting effect in photoelectric conversion with dye multilayers on a semiconductor electrode

Hiroyasu Sato, Masahiro Kawasaki, Kazuo Kasatani et al. · The Journal of Physical Chemistry · 1988 · 13 citations

Natural Sciences, Chemistry, Materials Science +13

Study of EUVL mask defect repair using FIB-GAE method

Tsuyoshi Amano, Yasushi Nishiyama, Hiroyuki Shigemura et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 12 citations

Natural Sciences, Materials Engineering, Materials Science +15

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