Concepedia
Statistics
Publications
25
Citations
420
H-Index
13
Active since
2004
Affiliations
University of Hyogo(Current)
Ebara (Japan)
Tohoku University
Tsuyoshi Amano is an author at University of Hyogo specializing in microscopy, applied physics, and engineering.
Top concepts
EngineeringApplied PhysicsMicroscopyOphthalmologyMedicineElectrical EngineeringInstrumentationMicroelectronicsMicrofabricationOptical Properties
Publications per year
2004–2024
Chemical pressure effect on the superconductor MgCNi3
M. Uehara, Tsuyoshi Amano, Sachiko Takano et al. · Physica C Superconductivity · 2006 · 41 citations
Materials Science, Superconducting Material, High-tc Superconductivity +4
Phase defect characterization on an extreme-ultraviolet blank mask using microcoherent extreme-ultraviolet scatterometry microscope
Tetsuo Harada, Yusuke Tanaka, Takeo Watanabe et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2013 · 34 citations
Engineering, Electron-beam Lithography, Microscopy +18
Development of new FIB technology for EUVL mask repair
Fumio Aramaki, Takashi Ogawa, Osamu Matsuda et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 31 citations
Materials Science, Ion Implantation, Engineering +14
Patterned mask inspection technology with projection electron microscope technique on extreme ultraviolet masks
Ryoichi Hirano, S. Iida, Tsuyoshi Amano et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2014 · 23 citations
Development of extreme ultraviolet mask pattern inspection technology using projection electron beam optics
Ryoichi Hirano, Hidehiro Watanabe, S. Iida et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2013 · 22 citations
Engineering, Electron-beam Lithography, Microscopy +17
1–5 of 25