Tsuyoshi Amano

Chemical pressure effect on the superconductor MgCNi3

M. Uehara, Tsuyoshi Amano, Sachiko Takano et al. · Physica C Superconductivity · 2006 · 42 citations

Natural Sciences, Materials Engineering, Materials Science +11

Phase defect characterization on an extreme-ultraviolet blank mask using microcoherent extreme-ultraviolet scatterometry microscope

Tetsuo Harada, Yusuke Tanaka, Takeo Watanabe et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2013 · 34 citations

Natural Sciences, Materials Engineering, Materials Science +15

Development of new FIB technology for EUVL mask repair

Fumio Aramaki, Takashi Ogawa, Osamu Matsuda et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 32 citations

Engineering, Materials Engineering, Materials Science +11

Patterned mask inspection technology with projection electron microscope technique on extreme ultraviolet masks

Ryoichi Hirano, S. Iida, Tsuyoshi Amano et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2014 · 23 citations

Engineering, Electrical Engineering, Materials Science +17

Development of extreme ultraviolet mask pattern inspection technology using projection electron beam optics

Ryoichi Hirano, Hidehiro Watanabe, S. Iida et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2013 · 22 citations

Engineering, Manufacturing Engineering, Materials Science +17